Brochures
Process gases monitoring for semiconducting manufactures
Long-term monitoring for trace gases by using
Reaction gas analysis on Nitride Semiconductor by using “infiTOF”
Top Applications for Kanomax FMT’s infiTOF High-Resolution Mass Spectrometer
Unlock the full potential of Kanomax FMT’s infiTOF – a compact, high-resolution mass spectrometer designed for real-time gas analysis across various industries. Explore the key applications below:
Achieve precise, real-time gas composition analysis for industrial and research environments.
Detect and quantify atmospheric gases and pollutants with unparalleled accuracy.
Ensure contamination detection and quality control through advanced process gas analysis.
Monitor advanced materials synthesis processes and detect trace level contaminants.
Perform molecular and elemental analysis to drive discoveries in chemistry and physics.
Characterize hydrogen, hydrocarbons, and other fuel gases for energy sector advancements.
Conduct isotopic analysis and monitor radioactive gases with precision.
Analyze volatile organic compounds (VOCs) and process gases essential to pharmaceutical and biotech industries.
Resolution: >30,000 (FWHM for N2)
Mass range: m/z 1~1000
Sampling rate: 2GS/s
Ion source: EI
Dimensions: 10.7” W (270 mm) x 18.4” H (465 mm) x 21.7” D (550 mm)
Weight: 84.9 lbs. (38.5kg)
1. General
This device is a compact high-resolution time-of-flight mass spectrometer using multi-turn technology for to achieve the resolution needed for gas analysis.
2. Model: MS-infiTOF-II
3. Performance
a. Mass range: m/z 0.8 - 1000
b. Resolution: 30,000 (FWHM) for N2
c. Sensitivity: 132Xe in atmosphere (~22 ppb) S/N ≧ 10 (Direct inlet using capillary tube)
d. Mass axis stability: Δ ≦100ppm per hour (m/z 28 is used)
e. Mass accuracy: 3.0 mDa(internal standard)
5.0 mDa(external standard)
4. Configuration details
a. Ionization method: EI: Electron Ionization/Positive
b. Ion source vacuum chamber: Titanium with electrolytic polishing
c. Filament: Rhenium coil x 2 sets
d. Ionization voltage: 0-100V
e. Ionization current: < 300uA
f. Ion source heater: 60-350 deg C
g. Analyzer: Multi-turn
h. Detector: MCP+IPD hybrid
i. Vacuum system: 67L/s TMP x2 + 10L/m diaphragm pump x2
j. Reaching vacuum: Ion source: 3x10E-5 Pa , Analyzer: 2x10E-5 Pa
k. Vacuum gauge: Hot cathode w/ Pirani gauge x2
5. Operating system:
Windows10 64 bit English
CPU core i7
Main memory 8GB or more
SSD drive 500GB or more
Display 1920 x 1080
6. Installation environment
a. Running temperature: 15-30 deg C
b. Temperature change: < 3 deg C per day
c. Power: Single phase 100 ~ 240VAC 50/60 Hz 0.5kVA