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Process gases monitoring for semiconducting manufactures
Long-term monitoring for trace gases by using
Reaction gas analysis on Nitride Semiconductor by using “infiTOF”
Aerosol Sample Heater
Precise Heating for Reliable Aerosol Analysis
Ensures accurate, condensation-free sampling by maintaining stable, high-temperature conditions.
The Kanomax FMT Aerosol Sample Heater (ASH) is a critical accessory for scientists and engineers monitoring low-volatility and corrosive process chemicals such as sulfuric acid and organics. Designed specifically to support the STPC3+ (Model 9010-03-Plus), this compact bench top unit ensures accurate, condensation-free sampling by maintaining stable, high-temperature conditions.
Key Features:
- Stable Temperature Control: Heats aerosol conduit walls to a feedback-controlled temperature up to 260°C, with real-time monitoring using an integrated thermocouple.
- Prevents Condensation: Immediately introduces dilution gas at the end of the heated conduit to stabilize volatile components and prevent loss due to condensation.
- Ready for Challenging Environments: Built with proprietary, corrosion-resistant materials to handle aggressive chemical aerosols.
- Versatile Compatibility: Ideal for use with Kanomax FMT’s STPC3+ or in standalone benchtop configurations.
- Digital Connectivity: Includes RJ45 (Modbus TCP/IP, OPC/UA) and USB-A for status data access, plus BNC safety interlock support.
Applications
Top Applications for Kanomax FMT’s Electrical Mobility Particle Spectrometer
Explore the key applications below:
Semiconductor Manufacturing
- Monitoring process chemicals in cleanroom environments (e.g., sulfuric acid, phosphoric acid aerosols)
- Ensuring precise particle measurements in critical cleaning and etching processes
- Preventing condensation during sampling of low-volatility chemicals in wafer fabrication
Advanced Materials and Coating Processes
- Characterizing aerosols from organic solvents or low-vapor-pressure precursors
- Supporting quality assurance in atomic layer deposition (ALD) or chemical vapor deposition (CVD) systems
Battery Manufacturing and Energy Storage
- Measuring aerosols in lithium-ion battery production environments
- Preventing condensation of electrolyte vapors or organic additives during particle sampling
Environmental and Workplace Exposure Monitoring
- Collecting aerosol samples in hazardous workspaces where corrosive gases are present
- Supporting compliance with exposure standards for low-volatility airborne chemicals
Research & Development
- Academic and industrial research involving volatile organic compounds (VOCs) or condensable aerosols
- Studying particle behavior in elevated temperature conditions
Effortless Particle Classification and Analysis: Neutralizer to CPC in Action
| Power | 120W, 100–240 VAC |
| Dimensions (L × W × H) | 8.5” × 9.0” × 8.5” (excluding connectors/tubing) |
| Ambient Temperature Range | 15–35°C (59–95°F) |
| Heater Setpoint Range | 30–260°C |
| Sample Gas Flow | 0.1–0.7 LPM |
| Dilution Gas Flow | 0–10 LPM (Mass Flow Controller) |
| Supply Gas | Compressed Air/Nitrogen, 30–100 psig |
| Gas Purity | ISO 8573 Class 2 or better |
| Connections | ¼” and ⅜” Swagelok® Tube Fittings |
| Communication | RJ45 (Modbus TCP/IP, OPC/UA), USB-A, BNC Interlock |
Resolution: >30,000
Mass range: m/z 1~1000
Sampling rate: 2GS/s
Ion source: EI
Dimensions (mm), Weight:
infiTOF: W270 x H465 x D550, 38.5kg
smartGC: W245 x H465 x D550, 18kg
Trap: W260 x H600 x D260, 5kg
Great for analyzing Nitrogen-containing organics and real-time reaction fragments
How it works
1. Aerosol Inlet
A sample aerosol flow enters the ASH through a Swagelok® fitting, carrying low-volatility chemicals such as sulfuric acid, organics, or other condensable compounds.
2. Heated Conduit Path
The aerosol travels through a specially designed heated conduit, where the walls are actively maintained at a precisely controlled temperature (up to 260°C) using an internal feedback system.
- This heating prevents the chemical components in the aerosol from condensing onto the conduit walls.
- A thermocouple sensor placed at the end of the conduit continuously monitors the gas temperature to ensure consistent performance.
3. Dilution Gas Injection
Immediately after exiting the heated conduit, a stream of dilution gas (clean air or nitrogen) is introduced into the flow.
- This step rapidly lowers the aerosol concentration and temperature, stabilizing the sample for downstream measurement.
- It also protects sensitive detectors and prevents re-condensation of volatile components.
4. Sampling and Venting
The diluted aerosol is now ready to be:
- Sampled by external instruments (e.g., STPC3+)
- Vented safely via a dedicated outlet (3/8” Swagelok® fitting)