Semiconductor

Ultra-Sensitive Particle Detection for Next-Gen Semiconductor Manufacturing

Kanomax FMT delivers cutting-edge solutions to detect, size, and analyze sub-20nm particles, supporting yield-critical processes such as CMP, UPW monitoring, and contamination control across the semiconductor lifecycle.

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Why Kanomax FMT for Semiconductor Applications?

Applications


  • Ultrapure Water (UPW) Particle Monitoring
    • Scanning Threshold Particle Counter
  • Chemical Mechanical Planarization (CMP) Slurry Analysis
    • Liquid Nanoparticle Sizer 
  • High-Purity Chemical Contamination Measurement
    • infiTOF
  • Non-Volatile Residue (NVR) Monitoring
  • Nanoparticle Collection and Analysis
    • Nano SpotLight System
Advancing Semiconductor Manufacturing with Reliable Data

Kanomax FMT is committed to empowering semiconductor manufacturers with measurement solutions that bring unparalleled precision, reliability, and ease of use to every phase of production. Our products help semiconductor companies maintain ultra-clean environments, optimize processes, and ensure the highest standards of product quality.

  • High-Sensitivity Particle Detection: The Scanning Threshold Particle Counter 3 is engineered to detect even the smallest particles, helping to identify and control contamination in cleanroom environments. This level of sensitivity is essential in semiconductor manufacturing, where particle control directly impacts product quality and yield.
  • Accurate Nanoparticle Sizing for Quality Control: The Liquid Nanoparticle Sizer System provides precise sizing and concentration measurements of nanoparticles in liquid, supporting the semiconductor industry’s requirements for ultra-pure materials. This ensures that raw materials meet strict quality standards, contributing to more reliable and consistent semiconductor products.
  • Advanced Trace Gas Analysis for Process Control: The infiTOF mass spectrometer offers high-resolution analysis of trace gases, enabling real-time monitoring of air quality and contamination sources. Its precision is ideal for semiconductor manufacturing, where controlling gas purity and identifying trace contaminants are essential to maintaining cleanroom standards and process stability.
  • Supporting Compliance and Process Efficiency: Kanomax FMT’s tools are specifically designed to meet the semiconductor industry’s stringent standards for quality and compliance. Our instruments provide the detailed data required for quality assurance, process optimization, and regulatory compliance, helping companies safeguard their production lines and achieve operational efficiency.

MS-infiTOF-II

infiTOF-Duo

Compact High-Resolution Mass Spectrometer for Accurate Gas Analysis 
  • Compact, High-Performance Design 
  • Real-Time Data Acquisition
  • Versatile Applications

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LNS 9310

Liquid Nanoparticle Sizer System

Precision Particle Size Measurement

The LNS is an excellent choice for measuring particle size distributions in semiconductor Chemical Mechanical Planarization (CMP) slurries.

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STPC3 9010-03 

Scanning Threshold Particle Counter 3

3 Nm Ultrapure Liquid Quality Monitor

STPC3 Measures both Residue (Particle Precursors) and Native Particles. It can measure below the Optical Particle Counter Detection Limit!

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HHCPC 3800

Handheld Condensation Particle Counter

Ultra-Sensitive, Portable Particle Detection

Research-grade instrument designed for precise and efficient aerosol particle measurement

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PAMS

Portable Aerosol Mobility Spectrometer

Provide accurate and reliable aerosol measurements

Using electrical mobility classification to measure the size distribution and concentration of aerosol particles

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