Patents
Patent Number: US9086350B2
Inventors: Donald C. Grant, Mark R. Litchy, David Blackford, Derek R. Oberreit
Assignee: CT Associates Inc
Filing Date: August 22, 2012
Publication Date: July 21, 2015
Priority Date: January 22, 2008
Status: Active (expires November 7, 2029)
Application Number: US13/592,022
Original Assignee: CT Associates Inc
Abstract
This patent describes a method and apparatus for measuring the concentration and size distribution of particles in liquids. The technique involves creating an aerosol from the liquid sample, evaporating the droplets to dryness, and detecting the residual particles. This approach allows for accurate measurement of low concentrations of very small particles, particularly those less than 50 nanometers in size, in high-purity liquids and colloidal suspensions.
Background
In industries such as semiconductor manufacturing, ink production, and chemical processing, the presence of sub-50 nm particles in high-purity liquids can significantly impact product quality and yield. Traditional measurement techniques, like optical particle counters, struggle to detect particles below 50 nm due to limitations in sensitivity. This invention addresses the need for a reliable method to measure both the concentration and size distribution of such small particles in various liquid mediums.
Summary of the Invention
The invention provides a practical and efficient method for measuring small particle concentrations and size distributions in liquids. The process includes:
- Forming an aerosol from the liquid sample.
- Isolating small, uniformly sized droplets.
- Evaporating the droplets to remove the liquid.
- Counting and sizing the residual particles
The apparatus comprises a nebulizer/impactor to generate and isolate droplets, a dryer to evaporate the liquid, and a detector—such as a condensation particle counter (CPC) or scanning mobility particle sizer (SMPS)—to analyze the residual particles. This system is particularly effective for detecting low concentrations of particles smaller than 50 nm.
Detailed Description
Methodology:
- Aerosol Generation: The liquid sample is converted into an aerosol containing small droplets.
- Droplet Isolation: A nebulizer/impactor isolates droplets with diameters less than 10 micrometers, preferably around 1 micrometer.
- Evaporation: The isolated droplets are evaporated to dryness, leaving behind non-volatile residue particles.
- Detection: The residual particles are counted and sized using detectors like CPC or SMPS
Applications:
- Semiconductor Industry: Measuring ultra-fine particle contamination in ultra-pure water and chemicals.
- Filter Testing: Assessing the retention efficiency of filters with pore sizes smaller than 50 nm.
- Colloidal Suspensions: Determining particle size distributions in colloidal systems, such as chemical mechanical planarization (CMP) slurries and pigment-based inks.
Advantages:
- Enhanced sensitivity for detecting particles smaller than 50 nm.
- Ability to measure both particle concentration and size distribution.
- Applicable to various industries requiring high-purity liquid analysis
Claims
The patent includes claims related to:
- The method of forming an aerosol from a liquid sample, evaporating the droplets, and detecting residual particles.
- The apparatus comprising a nebulizer/impactor, dryer, and particle detector.
- Specific configurations and components of the apparatus to optimize measurement accuracy and efficiency.
Legal Events
- 2008-01-22: Priority date established with the filing of a provisional application.
- 2012-08-22: Non-provisional application filed.
- 2012-12-13: Publication of US20120312084A1.
- 2015-07-21: Patent granted as US9086350B2.
- 2029-11-07: Expected expiration date of the patent.
For more detailed information, you can access the full patent document here: US9086350B2 - Particle Concentration Measurement Technology
Patent Number: US11181459B2
Inventor: Derek Oberreit
Assignee: Kanomax-FMT Inc.
Filing Date: March 23, 2017
Publication Date: November 23, 2021
Priority Date: March 23, 2016
Status: Active (expires May 13, 2038)
Application Number: US15/467,746
Original Assignee: Kanomax-FMT Inc.
Link to Full Patent: Google Patentskanomax-usa.com+2patents.google.com+2eureka.patsnap.com+2
Abstract
This patent describes a compact condensation particle counter (CPC) that utilizes a particle vapor reactor (PVR) with a fluid flow conduit transitioning from a circular to a rectangular and back to a circular cross-section. The PVR includes a saturator section and a condenser section, enabling efficient condensation of vapor onto particles for optical detection.
Background
Traditional CPCs often face challenges such as long sample paths and complex flow geometries, leading to increased response times and particle losses due to deposition on conduit walls. This invention addresses these issues by introducing a compact design that minimizes these drawbacks.eureka.patsnap.com
Summary of the Invention
The invention presents a CPC design featuring:patents.google.com+1kanomax-usa.com+1
- Particle Vapor Reactor (PVR): A reactor body with a fluid flow conduit having an inlet end and an outlet end, transitioning from circular to rectangular and back to circular geometry.eureka.patsnap.com
- Saturator Section: Where the aerosol is exposed to a vapor-saturated environment, leading to supersaturation conditions.patents.google.com
- Condenser Section: Where vapor condenses onto particles, increasing their size for optical detection.patents.google.com+1eureka.patsnap.com+1
This configuration enhances the efficiency of particle detection, particularly for nanoparticles, by improving vapor condensation dynamics and reducing particle losses.eureka.patsnap.com
Detailed Description
Design Features:
- Conduit Geometry: The fluid flow conduit transitions from a circular cross-section at the inlet, to a rectangular cross-section in the midsection, and back to a circular cross-section at the outlet.eureka.patsnap.com+1patents.google.com+1
- Material Composition: The conduit is fabricated from porous materials, such as sintered polymers or metals, to facilitate vapor saturation and condensation processes.patents.google.com
- Sheath Flow: The aerosol sample can be sheathed by a gas with different properties to modify gas characteristics within the aerosol, enhancing condensation efficiency.patents.google.com+1eureka.patsnap.com+1
Operational Process:
- Aerosol Introduction: The aerosol sample enters the PVR through the inlet.patents.google.com+1eureka.patsnap.com+1
- Saturation: In the saturator section, the aerosol is exposed to a vapor-rich environment, achieving supersaturation conditions.patents.google.com+1eureka.patsnap.com+1
- Condensation: In the condenser section, vapor condenses onto the particles, enlarging them for easier optical detection.patents.google.com
- Detection: The enlarged particles are detected using optical methods, allowing for accurate particle concentration measurements.
Advantages
- Compact Design: Reduces the overall size of the CPC, making it more portable and suitable for various applications.
- Enhanced Efficiency: Improves particle detection efficiency, especially for nanoparticles, by optimizing vapor condensation dynamics.
- Reduced Particle Loss: Minimizes particle deposition on conduit walls, ensuring more accurate measurements.patents.google.com
Applications
This compact CPC technology is applicable in various fields requiring precise particle measurements, including:
- Environmental Monitoring: Assessing air quality by detecting fine particulate matter.
- Industrial Hygiene: Monitoring workplace environments for nanoparticle exposure.
- Research Laboratories: Studying aerosol particle behavior and characteristics.
For more detailed information, you can access the full patent document here: US11181459B2 - Compact Condensation Particle Counter Technology
Patent Number: US7777868B2
Inventors: David B. Blackford, Frederick R. Quant, Derek R. Oberreit
Assignee: Fluid Measurement Technologies Inc.
Filing Date: November 6, 2007
Publication Date: August 17, 2010
Priority Date: November 7, 2006
Status: Active (expires November 26, 2028)
Application Number: US11/935,810
Original Assignee: Fluid Measurement Technologies Inc.
Link to Full Patent: Google Patentspatents.google.com
Abstract
This patent describes a system for monitoring non-volatile residue (NVR) concentrations in ultra pure water. The system includes a nebulizer that generates an aerosol from the water sample, a heating element that dries the aerosol to leave residue particles, and a condensation particle counter (CPC) that uses water vapor to grow the particles for optical detection. The nebulizer incorporates a flow dividing structure that segments exiting waste water into droplets, which are counted to determine the waste water flow rate and, indirectly, the input flow rate of water supplied to the nebulizer.patents.google.com
Background
In industries such as semiconductor manufacturing, maintaining the purity of ultra pure water is critical. Non-volatile residues in the water can deposit on components, leading to defects. Traditional methods for measuring NVR concentrations have limitations, including the use of flammable or toxic condensation media and challenges in accurately measuring low flow rates.
Summary of the Invention
The invention provides a system that:uspto.gov+3patents.google.com+3eureka.patsnap.com+3
- Generates an aerosol from ultra pure water using a nebulizer.
- Dries the aerosol to produce residue particles.
- Uses a CPC with water as the condensation medium to grow the particles for optical detection.
- Measures the waste water flow rate to determine the input flow rate without interfering with the sample used for residue measurement.patents.google.com
This approach eliminates the need for flammable condensation media and provides accurate, real-time monitoring of NVR concentrations.
Detailed Description
System Components:
- Nebulizer: Receives ultra pure water and pressurized gas to generate an aerosol.
- Aerosol Drying Stage: Evaporates the water from the aerosol, leaving residue particles.
- Condensation Particle Counter (CPC): Uses water vapor to grow the residue particles for optical detection.
- Flow Sensor: Measures the flow rate of waste water exiting the nebulizer.
Operational Process:
- Ultra pure water is supplied to the nebulizer, where it is combined with pressurized gas to form an aerosol.
- The aerosol passes through a drying stage, removing the water and leaving behind residue particles.
- The dried aerosol enters the CPC, where water vapor condenses onto the particles, enlarging them for optical detection.
- The waste water flow rate is measured downstream of the nebulizer, allowing for the calculation of the input flow rate without interfering with the sample.patents.google.com
Advantages:
- Eliminates the use of hazardous condensation media.
- Provides accurate, real-time monitoring of NVR concentrations.
- Non-intrusive flow rate measurement enhances system reliability.
Claims
The patent includes claims related to:eureka.patsnap.com+1uspto.gov+1
- The method of generating an aerosol from ultra pure water and measuring NVR concentrations.
- The apparatus comprising a nebulizer, aerosol drying stage, CPC, and flow sensor.
- The use of water as the condensation medium in the CPC.
- The method of determining the input flow rate based on waste water flow rate measurements.patents.google.com
Legal Events
- 2006-11-07: Priority date established with the filing of a provisional application.
- 2007-11-06: Non-provisional application filed.
- 2008-06-19: Publication of US20080144003A1.
- 2010-08-17: Patent granted as US7777868B2.
- 2028-11-26: Expected expiration date of the patent.patents.google.com+1eureka.patsnap.com+1
For more detailed information, you can access the full patent document here: US7777868B2 - System for Measuring Non-Volatile Residue in Ultra Pure Water
Patent Number: US10697879B2
Inventors: David Blackford, Derek Oberreit, Donald C. Grant, Gary Van Schooneveld, Mark R. Litchy
Assignee: Fluid Measurement Technologies Inc.
Filing Date: April 5, 2018
Publication Date: June 30, 2020
Priority Date: March 24, 2014
Status: Active (expires March 23, 2035)
Application Number: US15/945,783
Original Assignee: Fluid Management Technologies Inc.
Link to Full Patent: Google Patents
Abstract
This patent describes a method and apparatus for measuring the size distribution of colloidal particles in a fluid. The technique involves generating droplets from the colloidal fluid, evaporating the droplets to leave behind particles, and analyzing these particles to determine their size distribution. This approach allows for accurate measurement of colloid size distributions in various fluid mediums.
Background
In industries such as pharmaceuticals, food processing, and materials science, understanding the size distribution of colloidal particles is crucial for product quality and performance. Traditional measurement techniques may have limitations in accuracy, sensitivity, or applicability to certain types of colloids. This invention addresses the need for a reliable method to measure colloid size distributions in various fluid mediums.
Summary of the Invention
The invention provides a practical and efficient method for measuring colloid size distributions in fluids. The process includes:
- Forming droplets from the colloidal fluid.
- Evaporating the droplets to remove the fluid, leaving behind colloidal particles.
- Analyzing the residual particles to determine their size distribution.
The apparatus comprises components for droplet generation, evaporation, and particle analysis. This system is particularly effective for detecting a wide range of colloid sizes with high accuracy.
Detailed Description
Methodology:
- Droplet Generation: The colloidal fluid is converted into droplets using a suitable mechanism.
- Evaporation: The droplets are evaporated to dryness, leaving behind non-volatile colloidal particles.
- Analysis: The residual particles are analyzed to determine their size distribution.
Applications:
- Pharmaceutical Industry: Measuring colloid size distributions in drug formulations.
- Food Processing: Assessing colloidal properties in food products.
- Materials Science: Characterizing colloidal suspensions in various materials.
Advantages:
- Enhanced sensitivity for detecting a wide range of colloid sizes.
- Ability to measure size distributions accurately.
- Applicable to various industries requiring colloid analysis.
Claims
The patent includes claims related to:
- The method of forming droplets from a colloidal fluid, evaporating the droplets, and analyzing residual particles.
- The apparatus comprising components for droplet generation, evaporation, and particle analysis.
- Specific configurations and components of the apparatus to optimize measurement accuracy and efficiency.
Legal Events
- 2014-03-24: Priority date established with the filing of a provisional application.
- 2018-04-05: Non-provisional application filed.
- 2018-08-09: Publication of US20180224366A1.
- 2020-06-30: Patent granted as US10697879B2.
- 2035-03-23: Expected expiration date of the patent.
For more detailed information, you can access the full patent document here: US10697879B2 - Colloid Size Distribution Measurement Technology
Patent Number: US9513198B2
Inventors: Donald C. Grant, Mark R. Litchy
Assignee: CT Associates Inc.
Filing Date: September 19, 2013
Publication Date: December 6, 2016
Priority Date: January 22, 2008
Status: Active (expires May 18, 2030)
Application Number: US14/031,298
Original Assignee: CT Associates Inc.
Link to Full Patent: Google Patentsgetradiant.org+1glassdoor.com+1
Abstract
This patent describes a method and apparatus for measuring the concentration of non-volatile residues (NVR) in liquids. The technique involves generating an aerosol from the liquid sample, evaporating the droplets to dryness, and detecting the residual particles. This approach allows for accurate measurement of NVR concentrations in various liquid mediums.
Background
In industries such as semiconductor manufacturing, pharmaceuticals, and chemical processing, the presence of non-volatile residues in liquids can significantly impact product quality and yield. Traditional measurement techniques may have limitations in sensitivity and accuracy. This invention addresses the need for a reliable method to measure NVR concentrations in various liquid mediums.
Summary of the Invention
The invention provides a practical and efficient method for measuring NVR concentrations in liquids. The process includes:in211.communityos.org+2in.gov+2projects.propublica.org+2
- Forming an aerosol from the liquid sample.
- Evaporating the droplets to remove the liquid.
- Detecting and analyzing the residual particles.
The apparatus comprises components for aerosol generation, evaporation, and particle detection. This system is particularly effective for detecting low concentrations of non-volatile residues with high accuracy.
Detailed Description
Methodology:
- Aerosol Generation: The liquid sample is converted into an aerosol containing small droplets.
- Evaporation: The droplets are evaporated to dryness, leaving behind non-volatile residue particles.
- Detection: The residual particles are detected and analyzed to determine the NVR concentration.
Applications:
- Semiconductor Industry: Measuring ultra-fine residue contamination in ultra-pure water and chemicals.
- Pharmaceuticals: Assessing residue levels in drug formulations.
- Chemical Processing: Monitoring residue concentrations in various chemical processes.
Advantages:
- Enhanced sensitivity for detecting low concentrations of non-volatile residues.
- Ability to measure NVR concentrations accurately.
- Applicable to various industries requiring high-purity liquid analysis.
Claims
The patent includes claims related to:
- The method of forming an aerosol from a liquid sample, evaporating the droplets, and detecting residual particles.
- The apparatus comprising components for aerosol generation, evaporation, and particle detection.
- Specific configurations and components of the apparatus to optimize measurement accuracy and efficiency.
Legal Events
- 2008-01-22: Priority date established with the filing of a provisional application.
- 2013-09-19: Non-provisional application filed.
- 2014-01-16: Publication of US20140013831A1.
- 2016-12-06: Patent granted as US9513198B2.
- 2030-05-18: Expected expiration date of the patent.
For more detailed information, you can access the full patent document here: US9513198B2 - Residue Concentration Measurement Technology
Patent Application Number: US20190025165A1
Inventors: Derek Oberreit, David Blackford, Patricia B. Keady, Siqin He
Assignee: Kanomax FMT Inc.
Filing Date: July 24, 2018
Publication Date: January 24, 2019
Priority Date: July 24, 2017
Application Number: US16/044,376
Link to Full Patent Application: Google Patentskanomaxfmt.com+1kanomaxfmt.com+1
Abstract
This patent application describes a particle detection system and method that utilizes a nebulizer to generate an aerosol from a liquid sample, an extractor to remove waste material, and a particle detector to analyze the aerosol. The system is designed to improve the accuracy and efficiency of particle detection in various applications.
Background
Accurate detection and measurement of particles in liquids are critical in industries such as semiconductor manufacturing, pharmaceuticals, and environmental monitoring. Traditional methods may face challenges in sensitivity and efficiency. This invention addresses these issues by providing an improved system for particle detection.
Summary of the Invention
The invention provides a system that:kanomaxfmt.com+1kanomaxfmt.com+1
- Generates an aerosol from a liquid sample using a nebulizer.
- Employs an extractor to remove waste material from the aerosol.
- Utilizes a particle detector to analyze the aerosol for particle content.
This configuration enhances the accuracy and efficiency of particle detection in various applications.
Detailed Description
System Components:
- Nebulizer: Converts the liquid sample into an aerosol.
- Extractor: Removes waste material from the aerosol stream.
- Particle Detector: Analyzes the aerosol to detect and measure particles.
Operational Process:
- The liquid sample is introduced into the nebulizer, generating an aerosol.
- The aerosol passes through the extractor, which removes waste material.
- The cleaned aerosol enters the particle detector, where particles are detected and measured.
Advantages:
- Improved accuracy in particle detection.
- Enhanced efficiency in removing waste material.
- Applicable to various industries requiring precise particle measurement.
Claims
The patent application includes claims related to:
- The method of generating an aerosol from a liquid sample, extracting waste material, and detecting particles.
- The apparatus comprising a nebulizer, extractor, and particle detector.
- Specific configurations and components of the system to optimize performance.
For more detailed information, you can access the full patent application here: US20190025165A1 - Particle Detection System and Method