LNS 9310

Liquid Nanoparticle Sizer System

Precision Particle Size Measurement

The LNS is an excellent choice for measuring particle size distributions in semiconductor Chemical Mechanical Planarization (CMP) slurries.

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Liquid Nanoparticle Sizer System

The Liquid Nanoparticle Sizer System Model 9310 is a state-of-the-art solution for precise measurement of particle size distributions in colloidal suspensions, particularly for particles ranging 5.62 to 562 nm. Leveraging a three-stage integrated system—including a NanoParticle Nebulizer (NPN), an Annular Flow Ion Mobility Classifier (AFIMC), and a Fast Condensation Particle Counter (FastCPC)—it delivers actual, not relative, particle concentrations.

Key Features:

  • Measures particle size and concentration with high accuracy (5.62 – 562 nm)
  • Provides accurate characterization of multimodal particle distributions
  • Suitable for any particle shape and, composition
  • Integrates advanced NPN and AFIMC technologies


Applications:

  • CMP slurry analysis
  • Biopharmaceuticals
  • Filter testing

Model 9310 offers unmatched accuracy, precision, and resolution for nanoparticle characterization without shape or distribution assumptions.

Advantages of the LNS

  • Combines proven techniques (used by NIST and AIST, Japan) for counting and sizing aerosol size distributions with a unique nebulizer technology to successfully measure particle size and number concentration in concentrated liquid suspensions.
  • Offers greater accuracy, better precision, and improved resolution in CMP slurry size-measurement results (used extensively in the semiconductor industry).
  • Straightforward data inversion without complex inversion routines, assumptions or size calibrations. The software can identify each particle-size mode and assigns a cumulative size at 10%, 50% and 90% of the distribution. Changes in the size of a specific mode can be easily monitored with these size statistics.
  • Does not make assumptions about the shape of the particle size distributions and measures actual number concentrations not relative particle concentrations. (Instruments that provide relative particle concentrations can lead to significant misinterpretations when comparing different samples because they only provide measurements of relative concentrations within each sample.)


5.62 – 562 nm measurement range


Actual concentrations (not relative)


Any particle, any shape, any composition, any distribution (including multimodal)


Great for CMP slurry, bio-pharma, and filter testing

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