STPC3 9010-03

Scanning Threshold Particle Counter 3  

3 Nm Ultrapure Liquid Quality Monitor

STPC3 Measures both Residue (Particle Precursors) and Native Particles. It can measure below the Optical Particle Counter Detection Limit!

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Introducing the Kanomax Scanning Threshold Particle Counter 3 (STPC3) Model 9010-03, a cutting-edge instrument designed for ultrapure liquid quality monitoring with a sensitivity down to 3 nanometers. This advanced system excels in detecting both residue (particle precursors) and native particles, surpassing the limitations of traditional optical particle counters.

Key Features:

  • Exceptional Sensitivity: Accurately measures particles as small as 3 nm, enabling detection below the typical optical particle counter threshold.
  • Comprehensive Monitoring: Simultaneously assesses residue and native particles, providing a thorough analysis of ultrapure water (UPW) and dilute solvents, including IPA, hydrogen peroxide, ammonia, and hydrochloric acid.
  • Versatile Application: Ideal for monitoring UPW systems and evaluating the quality of ion exchange resins, adhering to industry standards such as SEMI C79 and SEMI C93.

Technical Specifications:

  • Measurement Range: 1E3 to 1E10 particles/mL
  • Inspection Volume Rate: 1-5 μL/min
  • Threshold Sizes: User-selectable 10-20 nm in 5 nm increments
  • Number of Size Channels: 1-3 (user configurable)
  • Total Flow Rate: 50-280 mL/min
  • Response Time: Less than 30 seconds to concentration changes


Developed in collaboration with CT Associates, Inc., the STPC3 Model 9010-03 is protected by multiple patents, ensuring its innovative design and functionality. Its advanced nebulization and condensation particle counting technique allows for precise monitoring of UPW and various dilute solvents, making it an indispensable tool for industries requiring stringent liquid purity standards.

Elevate your liquid quality monitoring with the Kanomax STPC3 Model 9010-03—where precision meets innovation.


Measure below the Optical Particle Counter Detection Limit!


STPC3 Measures both Residue (Particle Precursors) and Native Particles.


Monitor UPW and Dilute solvents (IPA, H2O2, Ammonia, HCl).


Versatile Applications

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