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Rapid Identification of sub-20nM Particles in UPW
NSL 9410
Nano Spotlight System
Collect UPW Nano Particles in One Spot
Rapidly collect and concentrate nanoparticles from Ultra-pure Water (UPW) systems, enabling fast and precise analysis for contamination monitoring and source identification.
Introducing the Nano SpotLight System Model 9410 by Kanomax FMT—a groundbreaking solution for rapid and precise collection of nanoparticles from Ultrapure Water (UPW) systems. Developed in collaboration with Aerosol Devices and CT Associates, this system employs the innovative Focused Aerosol Deposition (FAD) technique to collect particles as small as 5 nm in a concentrated spot, enabling swift analysis and identification.
Key Features:
- Efficient Particle Collection: Captures nanoparticles, including bacteria, organics, colloidal silica, and resin beads, depositing them into a spot smaller than 1 mm.
- Rapid Turnaround: Reduces sample collection time to approximately 24 hours, providing actionable insights significantly faster than traditional methods.
- Enhanced Analysis: Facilitates precise particle size measurement and elemental composition identification using Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS).
Applications:
- UPW System Monitoring: Essential for analyzing, fingerprinting, and troubleshooting UPW systems in semiconductor manufacturing.
- Contamination Source Identification: Assists in pinpointing sources of particle contamination, thereby improving yield and reducing manufacturing disruptions.
The Nano SpotLight System Model 9410 revolutionizes nanoparticle collection and analysis, offering unparalleled speed and precision for industries where contamination control is critical.
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How it works
he Nano SpotLight System Model 9410 operates using Focused Aerosol Deposition (FAD) technology to efficiently collect nanoparticles from Ultrapure Water (UPW) systems for rapid analysis. Here’s how it works:
Step-by-Step Process:
- Aerosolization of Nanoparticles:
- A sample of UPW is drawn into the system.
- The system converts suspended nanoparticles (e.g., bacteria, organics, colloidal silica, resin beads) into an aerosol, making them easier to collect.
- Focused Aerosol Deposition (FAD):
- The aerosolized particles pass through a specially designed aerosol focusing mechanism, which concentrates them into a narrow beam.
- These particles are then precisely deposited onto a collection substrate, forming a concentrated spot smaller than 1 mm in diameter.
- High-Resolution Analysis:
- The collected particles can be directly analyzed using Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS).
- These techniques provide detailed particle size distribution and elemental composition, enabling contamination source identification.
Why It’s Better Than Traditional Methods:
- Faster Results: Traditional water sampling can take weeks for meaningful analysis. The Nano SpotLight System reduces collection time to ~24 hours.
- Higher Sensitivity: Detects particles as small as 5 nm, providing ultra-precise contamination monitoring.
- Targeted Collection: Unlike bulk sampling methods, FAD deposits particles in a small, high-density spot, making SEM/EDS analysis easier and more effective.
Where It’s Used:
- Semiconductor manufacturing to monitor UPW purity.
- Yield optimization by pinpointing sources of nanoparticle contamination.
- Failure analysis and troubleshooting in high-purity water systems.
By leveraging Focused Aerosol Deposition, the Nano SpotLight System transforms nanoparticle detection in UPW systems, delivering unmatched speed, accuracy, and efficiency in contamination control.