Liquid Particle Monitors
Precision Particle Monitoring for Ultra-Pure Liquids. STPC3+ and STPC3: High-Sensitivity Detection, Real-Time Results
Contact usSTPC3 9010-03 Plus
Scanning Threshold Particle Counter 3 Plus
Reliable detection of nanoscale contaminants that lead to wafer defects


STPC3 9010-03
Scanning Threshold Particle Counter 3
3 Nm Ultrapure Liquid Quality Monitor
Advanced Liquid Particle Monitoring
The Kanomax FMT Scanning Threshold Particle Counter 3 (STPC3) and 3 Plus (STPC3+) are advanced liquid particle monitors designed for ultrapure water and chemical process applications. Both models utilize nebulization and condensation particle counting to detect particles as small as 3 nm, including native particles and nonvolatile residue precursors, offering real-time monitoring with minimal bubble interference.
The STPC3+ enhances the capabilities of the STPC3 by providing improved corrosion resistance for handling aggressive chemicals like hydrochloric and sulfuric acids, automated dilution control for an extended dynamic range, and seamless integration with existing systems through interfaces such as Ethernet, Wi-Fi, USB, and analog 4–20 mA. These features make the STPC3+ particularly suitable for industries requiring stringent contamination control, such as semiconductor manufacturing, pharmaceuticals, and biotechnology.