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Development and Evaluation of a 3 nm Ultrapure Liquid Quality Monitor
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Scanning Threshold Particle Counter 3 Model 9010-03: User Manual
STPC3 9010-03 Plus
Scanning Threshold Particle Counter 3 Plus
Reliable detection of nanoscale contaminants that lead to wafer defects
Measure below optical particle counters (OPC) size detection limits.
Why Choose the STPC 3+?
If you're operating in high-purity environments where every nanometer counts, the STPC3+ offers unmatched sensitivity, chemical compatibility, and confidence in your contamination monitoring.
The STPC3 Plus is a state-of-the-art nanoparticle detection system designed for continuous, real-time monitoring of ultrapure liquids used in high-precision industries. It pushes beyond the limitations of traditional Optical Particle Counters (OPCs), detecting both particles and particle precursors at threshold sizes as small as 3 nanometers—ideal for preventing costly wafer defects in semiconductor manufacturing and beyond.
Whether it’s ultrapure water or critical process chemicals, the STPC3+ ensures your fluid systems are free from the nanoscale contaminants that traditional tools miss.
Key Features:
- Advanced Sensitivity
Detect particles as small as 5 nm with unparalleled accuracy, making it ideal for applications requiring ultra-fine aerosol measurement. - High Throughput
Achieve rapid scanning and robust data output without sacrificing precision, ensuring efficiency even in demanding environments. - Real-Time Monitoring
Stay ahead with live particle size distribution and concentration updates to meet regulatory and operational needs. - Versatile Applications
Perfect for cleanrooms, semiconductor manufacturing, pharmaceutical production, and other controlled environments. - Intuitive Interface
A user-friendly touchscreen display and seamless software integration simplify operation, data management, and reporting. - Ultra-sensitive detection below optical particle counter limits
- Threshold sizes: 3, 9, 15 nm (user configurable)
Applications:
- Semiconductor manufacturing
- Ultrapure water system validation
- Ion exchange resin quality monitoring
- Chemical process control
- Excursion event detection
- Nanoparticle and precursor research
Measure below the Optical Particle Counter Detection Limit!
STPC3 Measures both Residue (Particle Precursors) and Native Particles.
Monitor UPW and Dilute solvents (IPA, H2O2, Ammonia, HCl).
Meets SEMI standards C79, C93, F121
How it works
1. Liquid Sample Introduction
The STPC3+ receives a sample of ultrapure water (UPW) or process chemical either:
- Directly from an online system, or
- As a grab sample, depending on the application.
2. Nebulization (Aerosolization of Liquid)
The instrument uses a proprietary nebulization process to convert the liquid into an aerosol. This step:
- Extracts contaminants from the liquid,
- Transforms dissolved and particulate matter into airborne droplets,
- Minimizes artifacts that can disrupt accurate readings or weaken correlation to on-wafer defect data.
This process is key to simulating real-world defect behavior from liquid contamination.
3. Condensation Particle Counting (CPC)
Once the aerosol is formed:
- It passes through a condensation particle counter, where individual particles are grown via condensation of a working fluid (n-butanol/water) to detectable sizes.
- The particles are then optically counted and sized as they pass through a laser-based detection chamber.
This allows detection of both actual particles and particle precursors (non-volatile residues) that OPCs (optical particle counters) cannot measure.
4. Threshold Size Filtering
The system is configured to detect particles at 3, 9, or 15 nanometers, using a selectable threshold approach.
- These sizes mimic the defect-causing contaminants in semiconductor and ultrapure processes.
- Up to three user-configurable size channels can operate with only 5 minutes of dead time between channel changes.
5. Real-Time Data Output & Logging
The results are:
- Processed in less than 30 seconds,
- Displayed on a 7-inch color touchscreen,
- Logged to internal Micro SD storage, and
- Exportable via Ethernet, Wi-Fi, USB, or analog signal (4–20 mA).
| Category | STPC3 9010-03 | STPC 9010 | PMS Ultra DI® 20 |
|---|---|---|---|
| Size channels [nm] | 3, 9, 15 | 10, 15, 20 | 20, 50, 70, 100 |
| Operating principle | Nebulization + condensation particle counting | Nebulization + condensation particle counting | Light scattering in liquid, mapped to a particle concentration |
| Allowed liquids | UPW, IPA, Peroxide, Ammonia | UPW | UPW |
| Native Particles? | Yes | Yes | Yes |
| NVR / Particle Precursors? | Yes | Yes | No |
| Material dependent? | No | No | Yes |
| Bubble interference? | No | No | Yes |
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