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Development and Evaluation of a 3 nm Ultrapure Liquid Quality Monitor
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Scanning Threshold Particle Counter 3 Model 9010-03: User Manual
STPC3 9010-03
Scanning Threshold Particle Counter 3
3 nm Ultrapure Liquid Quality Monitor
STPC3 Measures both Residue (Particle Precursors) and Native Particles. It can measure below the Optical Particle Counter Detection Limit!
The industry’s only real-time liquid 3 nanometer particle counter.
STPC3-UPW
Industry leading >3nm, >9nm, and >15nm particle counting performance for Ultrapure Water applications.
STPC3-IPA
Industry leading >3nm, >9nm, and >15nm particle counting performance for Isopropyl Alcohol applications.
STPC3-CHEM
Industry leading >3nm, >9nm, and >15nm particle counting performance for other non-corrosive chemicals (including UPW and IPA) applications.
Introducing the Kanomax Scanning Threshold Particle Counter 3 (STPC3) Model 9010-03, a cutting-edge instrument designed for ultrapure liquid quality monitoring with a sensitivity down to 3 nanometers. This advanced system excels in detecting both residue (particle precursors) and native particles, surpassing the limitations of traditional optical particle counters.
Measure below the Optical Particle Counter Detection Limit!
STPC3 Measures both Residue (Particle Precursors) and Native Particles.
Monitor UPW and Dilute solvents (IPA, H2O2, Ammonia, HCl).
Versatile Applications
Key Features:
- Exceptional Sensitivity: Accurately measures particles as small as 3 nm, enabling detection below the typical optical particle counter threshold.
- Comprehensive Monitoring: Simultaneously assesses residue and native particles, providing a thorough analysis of ultrapure water (UPW) and dilute solvents, including IPA, hydrogen peroxide, ammonia, and hydrochloric acid.
- Versatile Application: Ideal for monitoring UPW systems and evaluating the quality of ion exchange resins, adhering to industry standards such as SEMI C79 and SEMI C93.
Technical Specifications:
- Measurement Range: 1E3 to 1E10 particles/mL
- Inspection Volume Rate: 1-5 μL/min
- Threshold Sizes: User-selectable 10-20 nm in 5 nm increments
- Number of Size Channels: 1-3 (user configurable)
- Total Flow Rate: 50-280 mL/min
- Response Time: Less than 30 seconds to concentration changes
Developed in collaboration with CT Associates, Inc., the STPC3 Model 9010-03 is protected by multiple patents, ensuring its innovative design and functionality. Its advanced nebulization and condensation particle counting technique allows for precise monitoring of UPW and various dilute solvents, making it an indispensable tool for industries requiring stringent liquid purity standards.
Elevate your liquid quality monitoring with the Kanomax STPC3 Model 9010-03— See what others can't!
How it works
Industry Recognition
C79-0113 Guide to Evaluate the Efficacy of Sub-15 nm…
C93-0217 Guide for Determining the Quality of Ion Exchange Resin Used in…
Patent Protected
Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed to Kanomax FMT.
Kanomax FMT has applied for additional domestic and international patents for technology contained within the STPC System.
Patent number 7,852,465 has been issued to Kanomax.
The STPC3 was developed in collaboration with CT Associates, Inc.
Allowed Chemicals
IPA 0.10 v/v at the Sample port (limited by peristaltic pump tubing); 0.0001 v/v at nebulizer
Hydrogen Peroxide: 0.35 v/v at sample port; 0.001 v/v at nebulizer
Ammonia: Max pH 12 at sample inlet / pH 9 at the nebulizer
For all other chemicals and chemical blends, contact the factory.
STPC3 Comparison to Optical Particle Counters
| Category | STPC3 9010-03 | STPC 9010 | PMS Ultra DI® 20 |
|---|---|---|---|
| Size channels [nm] | 3, 9, 15 | 10, 15, 20 | 20, 50, 70, 100 |
| Operating principle | Nebulization + condensation particle counting | Nebulization + condensation particle counting | Light scattering in liquid, mapped to a particle concentration |
| Allowed liquids | UPW, IPA, Peroxide, Ammonia | UPW | UPW |
| Native Particles? | Yes | Yes | Yes |
| NVR / Particle Precursors? | Yes | Yes | No |
| Material dependent? | No | No | Yes |
| Bubble interference? | No | No | Yes |
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